Celsior - B2B貿易平臺 - 王牌供應商

Celsior

key feature of Celsior is its efficiently designed and innovative
chamber, which offers increased throughput resulting in lower cost
of ownership (CoO). Other unique features include:

Small reaction chamber utilizing computer modeled gas flow
dynamics to reduce the reaction volume and remove extraneous
spaces—reducing the areas available for defect formation resulting
in higher die yields

Patented showerhead design allows rapid, uniform gas delivery that
is capable of meeting less than 1 percent thickness uniformity
requirements across a 300-mm wafer

Reliable, field proven central transfer hub, which includes robust
control system—translating into higher system uptime and availability

Extendibility and Flexibility by allowing near seamless process
chamber additions for adding future capacity or new material and
process technology