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Single Wafer PECVD System
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The Eagle family of single wafer Plasma Enhanced CVD (PECVD)
systems has demonstrated superior production performance. The
Eagle products' features include high productivity, high up-time,
stable uniformity, small footprint, simple mechanism and low CoO.
In addition, for 90-65nm design uses, low-k materials,
named "Aurora?2.7", can be compatible with copper designs and
easily integrated into the damascene process.
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| 公司名稱 |
ASM international
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| 地址
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2F-1,No.38,Jin Shan 2nd Street,台灣
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| 郵政編碼 |
300
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| 電話 |
886-3-5637782
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| 傳真 |
886-3-6661835
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| 移動電話 |
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| 電子郵箱 |
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| 網站 |
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| 聯絡人 |
/
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詢盤籃
幫助
ace_suppliers@hotmail.com 
604292613