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Epsilon
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Extension of Epsilon reliability, modularity and maintenance access
Flexibility in new production wafer handling automation
Process module is MESC cluster tool compatible
Clean room wall requirement is comparable to 200mm
Reduced Pressure (RP) capability
Factory automation features such as:
Mini environment, WIP automation, FOUP, AGV / OTS, and standard
carriers
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| 公司名稱 |
ASM international
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| 地址
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2F-1,No.38,Jin Shan 2nd Street,台灣
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| 郵政編碼 |
300
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| 電話 |
886-3-5637782
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| 傳真 |
886-3-6661835
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| 移動電話 |
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| 電子郵箱 |
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| 網站 |
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| 聯絡人 |
/
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詢盤籃
幫助
ace_suppliers@hotmail.com 
604292613