Dimenson ( W / D / H ) : 1550mm X 1200mm X 2000mm Weight : 1500kg Chuck theta : +/- 10 degree Microscope coarse adjustment 400mm X 500mm Microscope fine adjustment 25mm X 25mm Microscope Z pneumatic up 60mm Chuck size 400mm X 500mm Chuck go out 250mm for easy substrate loading Platen travel range 600mm X 700mm Vibration damper X 4 Other size on request
詢盤籃
幫助
ace_suppliers@hotmail.com 
604292613