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NESLAB Recirculating Chillers and Heat Exchangers for Simiconductor Applictions
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NESLAB Recirculating Chillers and Heat Exchangers for
Simiconductor Applictions
Typical simiconductor applications:
Processes:
- Dry tech – plasma(e.g RF/Microwae)
- Wet tech
- Dry Deposition (e.g. CVD, SACVD, PVD)
- Wet Deposition (e.g. ECP)
- Ion Implantation
- Plasma asher
- Planarization
Components
- Chamber walls
- Cathodes
- Dornes
- Upper/lower electrodes
- Chucks/disks
- Ozone generators
- Cleaning baths and plating tanks
- RF Power Supplies
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| 公司名稱 |
杜商股份有限公司
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| 地址
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中華路122-2號,湖口鄉,新竹縣,台灣
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| 郵政編碼 |
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| 電話 |
886-3-5986638#29
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| 傳真 |
886-3-5986639
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| 移動電話 |
886938357170
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| 電子郵箱 |
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| 網站 |
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| 聯絡人 |
余政道 / Vice President
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詢盤籃
幫助
ace_suppliers@hotmail.com 
604292613