Camtek’s LAM 868 is specially designed for main-stream Large Area Masks (LAM) inspection. It offers unparalleled detection ability on LAM with down to 25 µm line/space width technology
The LAM 868 incorporates advanced technology innovations to ensure the level of detection that these fine masks require at this critical production stage. Since masks are used with transmissive light, Camtek’s LAM 868 inspection system implements the same light path to ensure a reliable inspection.