Designed as a stand-alone horizontal wafer transfer system, the HWTS-300 provides maximum carrier interface flexibility for pilot lines, labs and anywhere 300mm wafers are transferred to or from multiple FOUPs or open cassettes. By using Fortrend proven modules, the Golden Gate 300 can safely and quickly transfer wafers into the required carriers. Flexible Up to 4 I/Os are available for FOUPs or open cassettes. FOUP adapter plates for open cassettes Ergonomic cassette tilt stage for operator and wafer safety.
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