Lamina II Reticle Sorter

The Lamina II transfers and sorts reticles for multiple processes
required in semiconductor fabs and photomask manufacturing
plants. The design utilizes Fortrends proven modules to offer flexible
and reliable configurations and multiple reticle carrier interfaces
without costly custom design or time-consuming set-ups.
Ergonomic tilt stage for multiple open cassettes and pod openers for
SEMI standardized SMIF carriers and RSP
Dual arm robot with vacuum or active edge-grip end effector
Recipes for straight transfer, reverse selection, auto-fill, split and
merge etc.
Easy recipe creation through state-of-the-art graphical macro
programming interface software
Event log, system analysis program, operation security, alarm
handling & recovery
Golden Gate Software Suite™