Episorb II Dry Toxic Gas Scrubber is a Waste Gas Processing System that removes toxic and environmentally harmful gases exhausted by III-V MOCVD processes. Columns containing dry adsorption materials remove toxic products for later oxidation. Typical compounds that can be adsorbed include gaseous hydrides such as Arsine and Phosphine, and in addition, metal-organic vapours. Gases such as Nitrogen, Hydrogen and Helium pass through the Episorb unaffected. For standard III-V applications the Episorb II dry gas scrubber is supplied which uses activated charcoal as a scrubbing medium for toxic gases.
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