1. High precision and high stability measurement for the sheet resistance ( ohm/sq) & resistivity ( ohm.cm) 2. Full remote control & user friendly data analysis S/W, Auto & Manual range selection 3. Measuring range : 1 m Ω /sq - 2 M Ω /sq 4. Accuracy : ± 0.5 % (VLSI Standard Wafer, at 23℃) 5. Repeatability : ± 0.2 % under Precision Resistor 6. Astm & SEMI quick measurement mode 7. Measuring time: Aprprox.3±1sec/point