RF Plasma Generator

RF Plasma Generator, core equipment in the whole process, is a
semiconductor supplying power to process semiconductor Wafer.
For stable power supply, antenna inside this chamber provides a
high-frequency output with no negative impact on power source
device even under extreme loading change. Our RF Plasma
Generator is the most advanced trusted product among various
power devices. Based on our deep experiences and accumulated
technologies, high-efficient high-stable generators with a unique
design are being produced and sold, with a plan to introduce new
models with various frequencies and outputs.
New Power Plasma successfully produced RF Plasma Generator
domestically in 1997, beginning to supply 600W and 1.25б to
domestic semiconductor makers and to export them to the U.S.,
Japan and Taiwan. 3б and 5б generators have been developed.