|
|
|
|
| |
Purging pod
|
|
Purging pod with N2 or CDA in an ultra-clean environment,
Ionizers to remove charge on the surface of pod and also charge on
reticle,
Tool status can be sent to external computer for data acquisition,
RF-ID reader allows information of reticle to be recorded and sent to
external data acquisition device,
Purge station can be controlled remotely.
|
|
|
|
|
|
| 公司名稱 |
家登精密工業股份有限公司
|
| 地址
|
八德街428號,树林市,台北县,台灣
|
| 郵政編碼 |
|
| 電話 |
886-2-26800980
|
| 傳真 |
886-2-26800960
|
| 移動電話 |
|
| 電子郵箱 |
|
| 網站 |
|
| 聯絡人 |
李柏欽 /
|
|
|
|
|
詢盤籃
幫助
ace_suppliers@hotmail.com 
604292613