Laser CVD Repair

- The equipment repairs open defects with wiring by laser and CVD
technology, which are found after display inspection in TFT-LCD
process.
- It has adequate repair effect according to defect by using laser of
three waves.
- Semi auto repair is available. It is designed to use, maintain and
repair easily as it automatically moves to defect coordinate through
Interface with Tester System.
- The First Development in Korea (IR52 JANGYOUNGSIL Award)

- TFT LCD 5 ~ 7 Generation Application
- High Accurate Laser Cutting & CVD wiring
- High Speed & Low Noise & Stability
- High Accurate Gantry Stage Movement
- Stage Joystick Function
- Field Proven in Advanced Fab.
- Variable interfacing with DC Tester, GPIB, RS-232C, Host SECS I/II
or HSMS/SECS II