|
|
|
|
| |
gas systems
|
|
The gas systems are available for all commonly used atmospheric and sub-atmospheric process applications utilizing diffusion/pyrogenic and LPCVD processes. All gaslines are:
equipped with VCR couplings, orbital welded and helium leak tested
electropolished stainless steel 316L
utilized with bellow sealed pneumatic valves
Process control by Digital Process Controller (DPC)
Mass flow controllers with Softstart (programmable softstart)
In line filters with 0,003 μm retention
Screens, one per stack, with LEDs mounted on the front of the Gas Cabinet to check the used valves.
|
|
|
|
|
|
| 公司名稱 |
TEMPRESS SYSTEMS, INC.
|
| 地址
|
Brugstraat 2, 8181 VH Heerde,Netherlands
|
| 郵政編碼 |
|
| 電話 |
31-578-699200
|
| 傳真 |
31-578-693693
|
| 移動電話 |
|
| 電子郵箱 |

|
| 網站 |
|
| 聯絡人 |
/
|
|
|
|
|