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900ACS™ Etch
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The Tegal 900ACS™ Series combines a state-of-the-art Advanced
Control System with the most durable and most reliable non-critical
plasma etch tool in the semiconductor industry. No other line of
single wafer cassette-to-cassette etch systems in production today
offers the value and rapid return on investment for non-critical
plasma etch processes for 3in to 150mm wafers. For customers
already invested in the popular Tegal 900e Series, we offer
affordable field upgrades to the Advanced Control System. ACS
delivers faster throughput, faster system calibration, touchscreen
graphical user interface, integrated data logging, and factory
automation support. Don't be fooled by imitators. only Tegal offers
this capability with the sound engineering and reliability to stand
behind it and deliver the quality you've come to expect.
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| 公司名稱 |
Tegal Corporation
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| 地址
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新竹市光復路二段285號16樓,台灣
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| 郵政編碼 |
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| 電話 |
886-3-5727668
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| 傳真 |
886-3-5727646
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| 移動電話 |
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| 電子郵箱 |
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| 網站 |
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| 聯絡人 |
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詢盤籃
幫助
ace_suppliers@hotmail.com 
604292613