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980ACS™ Etch
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The Tegal 980ACS™ Series extends the most durable and most
reliable non-critical plasma etch tool in the semiconductor industry to
serve the 200mm fab line. No other line of single wafer cassette-to-
cassette etch systems in production today offers the value and rapid
return on investment for non-critical plasma etch processes for
200mm wafers. ACS delivers faster throughput, faster system
calibration, touchscreen graphical user interface, integrated data
logging, and factory automation support.
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| 公司名稱 |
Tegal Corporation
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| 地址
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新竹市光復路二段285號16樓,台灣
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| 郵政編碼 |
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| 電話 |
886-3-5727668
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| 傳真 |
886-3-5727646
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| 移動電話 |
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| 電子郵箱 |
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| 網站 |
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| 聯絡人 |
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詢盤籃
幫助
ace_suppliers@hotmail.com 
604292613