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Mini SEM
The FEG Mini SEM can operate at low voltage, where the beam
energy is selectable from 500 eV to 6 keV in steps of 1 eV. It has the
unique facility of being able to bias the specimen from 0 V to -6 kV in
steps of –1 V. The specimen bias facilitates very low beam landing
energy operation, as low as 10 eV, as well as providing a mixed
magnetic and electrostatic lens system to focus the beam on to the
specimen. The mixed lens configuration helps in attaining high-
resolution images at very low beam landing energies.

The complete SEM system, including column, gun, pump, display,
control and high tension electronics, is incorporated on to a small
trolley that can fit into small elevators, wheeled through narrow
doorways, or rolled on to the back of a mini-van. Moreover, each SEM
system is portable, since its column, electronics box, and vacuum
system can all be individually lifted and carried by hand.

FEG Mini SEMs can be taken on field trips or moved from floor to
floor in large buildings. This development creates the innovative
applications for SEMs, which may include schools, hospitals, and
even individual amateur researchers. The whole system fits on to a
trolley measuring 1000 mm in length, 600 mm in depth and 850 mm
in height. The FEG Mini SEM is a high performance low voltage SEM
(LVSEM), ideal for nanostructure inspection.
Magnification in the high resolution mode ranges from X 5,000
to 400,000 and in low resolution mode, varies from X 1,000 to
40,000.
The SEM has a Secondary Electron (SE) detector and a Back
Scattered Electron (BSE) detector

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