MICRO CLUSTER SYSTEM

The MAXIMUS 802 is a fully automatic and programmable cassette-
to-cassette micro-cluster system. It can be equipped with modules
as coater, developer, cleaning, HMDS vapor primer, hotplates and
coolplates for wafer sizes from Ø 2" up to Ø 8" and substrates from
2"x 2" up to 6"x 6". A precise and fast running robot, located in the
center of the microcluster is able to handle even fragile materials
very gently.
This system offers manufacturers a maximum of flexibility to find
exactly the right configuration for their process needs and provides
excellent uniformity and repeatability.

Features

Wafer sizes between 2"- 8" and substrate sizes between 2"x 2"- 6"x
6"
Flexible module configurations
1 spinner modules for spin coating and/or spray developing
DOMINUS coater, the revolutionary spray coating method,
configurable
4 stacked plug-and-play slots, configurable as: - Hotplate, -
Coolplate, - HMDS prime plate
Timesaving and stressreducing „on the fly" substrate centering
Booster devices on each module for increased throughput
Clear and easy to operate user interface with 15" flat touch-screen
Easy to clean, maintain and service set up
Options for MEMS, packaging and III/V material
Compact design and small footprint; no supplementary cabinets