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Remote Plasma Ashing Equipment
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-Low damage ashing by remote plasma method -High productivity of 160 wafers/h -Double process chamber -In combination with ICE/CDE/µASH process chamber -Many functions (series etching/parallel etching) -Applicable to 300mm wafer |
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| 公司名稱 |
Shibaura Mechatronics Taiwan Corporation
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| 地址
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9F 68 Hsin-Yi St,台灣
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| 郵政編碼 |
300
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| 電話 |
886-3-5284141
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| 傳真 |
886-3-5284140
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| 移動電話 |
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| 電子郵箱 |

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