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PD-220N (Model PD-220N)
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SAMCOs PD-220N is highly flexible and supports a wide range of applications, from cutting edge R&D to low volume manufacturing. The PD-220N is a unique Plasma-Enhanced Chemical Vapor Deposition (PECVD) system designed for the deposition of silicon- based thin films (SiO2, Si3N4, SiOxNy, a-Si:H).
The system offers all of the standard features for PECVD in a very compact footprint. Films with superior thickness and refractive index uniformity can be deposited over a 230mm diameter area, with excellent batch-to-batch repeatability. A computerized touch-panel provides a user-friendly interface for parameter control and recipe storage.
The SAMCO PD-220N is ideal for depositing thin film for research and development as well as pilot production applications.
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| 公司名稱 |
Samco Inc.
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| 地址
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17F-8 Empire Commercial Bldg. 295 Kuang-Fu Rd., Sec. 2, Hsinchu 300, Taiwan, R.O.C.,台灣
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| 郵政編碼 |
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| 電話 |
886-3-5165100
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| 傳真 |
886-3-5165101
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