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PD-220N
(Model PD-220N)
SAMCOs PD-220N is highly flexible and supports a wide range of
applications, from cutting edge R&D to low volume manufacturing.
The PD-220N is a unique Plasma-Enhanced Chemical Vapor
Deposition (PECVD) system designed for the deposition of silicon-
based thin films (SiO2, Si3N4, SiOxNy, a-Si:H).

The system offers all of the standard features for PECVD in a very
compact footprint. Films with superior thickness and refractive index
uniformity can be deposited over a 230mm diameter area, with
excellent batch-to-batch repeatability. A computerized touch-panel
provides a user-friendly interface for parameter control and recipe
storage.

The SAMCO PD-220N is ideal for depositing thin film for research
and development as well as pilot production applications.



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公司名稱 Samco Inc.
地址 17F-8 Empire Commercial Bldg. 295 Kuang-Fu Rd., Sec. 2, Hsinchu 300, Taiwan, R.O.C.,台灣
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電話 886-3-5165100
傳真 886-3-5165101
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