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Incoming Bare Wafer (AXi Series)
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The AXi™ Series for advanced macro defect inspection provides microelectronic device manufactures a single inspection solution for Litho, CMP, Etch, and Deposition process modules. Designed to exceed both typical macro resolution and throughput, the AXi Series provides timely, accurate and complete process information. This information enables process-enhancing decisions to increase yields, ultimately reducing costs and accelerating time-to-market |
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| 公司名稱 |
Rudolph Technologies, Inc.
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| 地址
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One Rudolph Road P.O. Box 1000 Flanders, New Jersey 07836,VIRGINIS.(US)
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| 郵政編碼 |
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| 電話 |
973-6911300
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| 傳真 |
973-6915480
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