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Incoming Bare Wafer
(AXi Series)
The AXi™ Series for advanced macro defect inspection provides
microelectronic device manufactures a single inspection solution for
Litho, CMP, Etch, and Deposition process modules. Designed to
exceed both typical macro resolution and throughput, the AXi Series
provides timely, accurate and complete process information. This
information enables process-enhancing decisions to increase
yields, ultimately reducing costs and accelerating time-to-market

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公司名稱 Rudolph Technologies, Inc.
地址 One Rudolph Road P.O. Box 1000 Flanders, New Jersey 07836,VIRGINIS.(US)
郵政編碼  
電話 973-6911300
傳真 973-6915480
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