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Metrology Systems for Advanced Processes (FE VII and FE VII-S Systems)
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The FE VII™ has a compact footprint, high throughput, and exceptional reliability to provide you with the production capabilities needed to lower your cost of ownership. Built around the Focused Beam™ laser ellipsometry technology, the FE VII measures films using multiple wavelengths and multiple angles of incidence for fast, reliable measurement of thick films while keeping the inherent accuracy when measuring thin ones. With powerful easy-to-use software and fully automated 200 mm handling solutions, the FE VII gives you the full-fab capability you want for demanding applications |
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| 公司名稱 |
Rudolph Technologies, Inc.
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| 地址
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One Rudolph Road P.O. Box 1000 Flanders, New Jersey 07836,VIRGINIS.(US)
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| 郵政編碼 |
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| 電話 |
973-6911300
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| 傳真 |
973-6915480
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