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Metrology Systems for Advanced Processes
(FE VII and FE VII-S Systems)
The FE VII™ has a compact footprint, high throughput, and
exceptional reliability to provide you with the production capabilities
needed to lower your cost of ownership. Built around the Focused
Beam™ laser ellipsometry technology, the FE VII measures films
using multiple wavelengths and multiple angles of incidence for fast,
reliable measurement of thick films while keeping the inherent
accuracy when measuring thin ones. With powerful easy-to-use
software and fully automated 200 mm handling solutions, the FE VII
gives you the full-fab capability you want for demanding applications

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公司名稱 Rudolph Technologies, Inc.
地址 One Rudolph Road P.O. Box 1000 Flanders, New Jersey 07836,VIRGINIS.(US)
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電話 973-6911300
傳真 973-6915480
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