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Reticle handling & Inspection
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The RECIF Technologies’ SPR reticle tool is automated reticle sorter with an inspection station combined with a de-ionized nitrogen cleaning feature. The reticle tool can be configured for both manual open shipping boxes and SMIF compatibility. Reticles can be transferred from open shipping boxes to SMIF POD’s.
The architecture utilizes RECIF Technologies’ transfer technology providing vacuum free reticle transfer and ID read, whilst continuous monitoring ensures total reticle safety. The design ensures minimal footprint together with greater access to carrier positions for manual or automated loading.
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| 公司名稱 |
recif tawan inc.
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| 地址
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新竹市民享街26号3楼,台灣
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| 郵政編碼 |
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| 電話 |
886-3-5783388
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| 傳真 |
886-3-5789900
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| 移動電話 |
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