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300mm equipement
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The SRT300G3plus utilises RECIF Technologies patented technology providing vacuum-free edge or back side contact wafer transfer. An in-house developed FFU ensures a Class 0.1 mini- environment.
Thanks to its alignment & OCR device embedded on the end effector, this standalone equipment achieves high throughputs, whilst the reduced footprint and minimal facility requirements decrease overall cost of ownership.
Equipment available in 2, 3 or 4 Load Port versions.
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| 公司名稱 |
recif tawan inc.
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| 地址
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新竹市民享街26号3楼,台灣
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| 郵政編碼 |
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| 電話 |
886-3-5783388
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| 傳真 |
886-3-5789900
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