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Point-of-use copper abatement
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The Aquareus system, jointly developed with BOC Edwards, abates
copper from a CMP system’s effluent stream. It concentrates
copper by a factor of 200:1, providing >99% removal efficiency and
over 3000 hours MTBF. A proprietary fluidized bed ion exchange
resin technology handles high flows from a broad range of CMP
chemical slurries. The company claims the system can save up to
$0.15/wafer, or 30% in treatment costs, over centralized back-pad
systems. |
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| 公司名稱 |
microlithography world
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| 地址
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VIRGINIS.(US)Nashua98 Spit Brook Road Nashua, NH 03062-5737
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| 郵政編碼 |
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| 電話 |
603-8910123
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| 傳真 |
603-8910597
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| 移動電話 |
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| 電子郵箱 |
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| 網站 |
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| 聯絡人 |
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詢盤籃
幫助
ace_suppliers@hotmail.com 
604292613