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Automated Magnetic Metrology
World's leading automated quasistatic test (QST) system for wafer
magnetic metrology
Enables control of magnetic deposition, anneal, and etch processes
for MRAM and Thin Film Head (TFH) production
Tightens the process feedback loop with early characterization of
MRAM bitcell read and write performance
Accelerates Magnetic Tunnel Junction (MTJ) stack development for
MRAM by enabling quantitative characterization of MTJ performance
independent of CMOS circuitry
Best in class magnetic field accuracy with patented, closed-loop
quadrupole magnet design; provides P/T<10%
Fastest quasistatic platform available; throughput >3600
devices/hour
Speeds pinning layer development with magnet options ranging
from 1000 Oe to 3700 Oe
Delivers lowest Cost of Ownership with standard, long-lasting probe
card technology (>100,000 touches)
Measures both device wafers and sheet resistance on blanket film
wafers

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公司名稱 KLA-Tencor Corporation
地址 1F,Building C,Tai Yuen,Hi-Tech Industrial Park No.22 Tai Yuen Street,Chupei,台灣
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