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Electron Beam Wafer Inspection System
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Electron beam wafer inspection system with high sensitivity and stable operation. Powerful for inspecting ultra fine pattern defects and electrical defects such as shorts or disconnects. High speed and high sensitivity inspection. Real-time Automatic Defect Classification function is available.
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| 公司名稱 |
HITACHI HIGH-TECHNOLOGIES CORPORATION
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| 地址
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24-14,Nishi-bashi 1-chome,Minato-ku,Japan
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| 郵政編碼 |
105-8717
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| 電話 |
81-3-35047155
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| 傳真 |
81-3-35047825
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| 移動電話 |
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| 電子郵箱 |

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