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System for Wafer Process
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The resist pattern slimming system realizes the next generation node device. High uniformity (Equivalent after lithography) Independence from pattern density High aspect ratio pattern is realized The next generation pattern is realized by conservative technique
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| 公司名稱 |
HITACHI HIGH-TECHNOLOGIES CORPORATION
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| 地址
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24-14,Nishi-bashi 1-chome,Minato-ku,Japan
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| 郵政編碼 |
105-8717
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| 電話 |
81-3-35047155
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| 傳真 |
81-3-35047825
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| 移動電話 |
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| 電子郵箱 |

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