Spray Cleaning System

From FSI International, the world’s leader in batch spray
processing, the ZETA® System offers the ultimate performance and
productivity for high contaminant removal applications.

High performance: Get the process repeatability you demand, since
all wafers receive the same fresh chemistry and are monitored with
APC features throughout processing.
Balance of throughput and cycle time: The high throughput of batch
processing now has unprecedented short cycle time, through
FlashClean™ Advantage, a package of hardware, software, and
process advancements.
Flexibility: Proprietary chemical mixing manifold enables you to
switch between processes on the same tool, with no downtime.