Immersion Cleaning System

In direct response to customer input, the MAGELLAN® System sets
new standards in immersion technology.

Shorter cycle time: Reduce your production time by up to 40%
through MAGELLAN® System’s multi-function tanks with super-
efficient mixing.
Breakthrough versatility and extendibility: Reduce your capital outlay.
One MAGELLAN® System can support multiple processes and
successive technology nodes.
Process performance: Improve yield and reduce learning curve with
MAGELLAN® System’s patented technologies.
Ultra-small footprint: Conserve your valuable cleanroom space with
modular configuration, up to 40% smaller than traditional wet
benches.
Applications:
FEOL critical clean, FEOL photoresist strip and post-ash clean,
Oxide etch, Nitride etch, wafer reclaim

Features:

Modular configuration from 2 to 7 process modules
Proprietary chemical mixing manifold on each process module, with
variable valve control and Advanced Process Control
STG® (Surface Tension Gradient) rinse/dry technology for watermark-
free dry based on Marangoni principle
SymFlow® in-situ oxide etching with APC etch control
Controlled, variable thickness DIO3 oxide regrowth
Advanced megasonics capabilities
Advanced robotics and materials management that is fast, flexible,
reliable, and aids process performance
Available configurations:

Fully automated 300mm
Fully automated 200mm (bridging to 300mm