Burn/Wet Point-of-Use Abatement<br>(CT-BW) - B2B貿易平臺

Burn/Wet Point-of-Use Abatement
(CT-BW)

The FLM series point-of-use abatement systems are highly efficient
systems used in semi-conductor and related industries. As new
process tools and technologies with highly corrosive gases and
increasing gas loads are introduced, further improvements in
abatement technology are required.

The CT-BW series is meeting these requirements. Besides the
features of the FLM series like high cleaning efficiency for PFC抯
and other gases, reliable abatement of all waste gases from CVD
and etching processes, selection of various fuel gases and SEMI
S2 / CE compliance, the system is designed to be highly corrosion
resistant and to handle high amounts of solid reaction products. A
straight gas inlet and exhaust line arrangement with optional
temperature management and the separation of functional units like
burner chamber, wet scrubber, tank and cooling system minimizes
the risk of blockages and leads to a considerable extension of
maintenance intervals.

Features and Benefits
Modular system design
High corrosion resistance due to use of special materials
Capable to handle large amounts of deposits
Extended maintenance interval with easy removal of deposits
Full-size wet scrubber section
Decoupled recooling system allows higher energy input for certain
applications
Improved service accessibility
SEMI S2 / CE compliant