versatile deposition systems

The Auto 500 is the next generation in affordable, versatile
deposition systems. Depending on your specific application, BOC
Edwards offers a wide range of vacuum chambers to meet
practically every need.

The stainless steel front loading box chambers are ideal for general
R&D, small scale production or pre-production applications. The new
500mm chamber easily takes large diameter substrates and allows
a combination of thermal resistance evaporation, electron beam and
RF/DC sputtering applications to be performed without breaking
vacuum.

Features and Benefits:
Wide range of vacuum chamber options PLC based vacuum
controller Extra feedthroughs holes built into the side wall
for extra process monitoring and residual gas analyzers Standard
diffusion, turbo, cryo pumping options Separate electronics rack
provides unlimited panel space for all thin film accessories and
power supplies