Manual Load Mask Aligner

Manual Load Mask Aligner. 220V, 1800VA, 60 Hz. Lamp house and
power supply are both capable of 1000W Hg. The CIC-1000 supply
is currently set to 350W. Alignment is done via splitfield optics, dual
cameras and video monitor. System is manual loading from the right
side. Exposure programs include: Proximity, soft contact, hard
contact and vacuum hard contact. Plasma touch screen allows easy
data input and editing programs on the PC. Max. wafer size: 150 mm.
System comes with all of the chucks and mask holders listed below:
Chucks: Square Chucks with sticky pad hold down: 7 in. x 7 in., 6 in. x
6 in., 5 in. x 5 in., 4 in. x 4 in. Round Chucks with vacuum hold down:
5 in. dia. chuck with vacuum contact ring. 4 in. dia. chuck with
vacuum contact ring. 3 in. dia. chuck. Mask Holders: 6 in. x 6 in. mask
with 5 in. dia. opening. 5 in. x 5 in. mask with 4 in. dia. opening. 4 in. x
4 in. mask with 3 in. dia. opening. 4 in. x 4 in. mask with 72.75 mm x
50 mm opening, also equipped with proximity spacers