gas(SDS2 Arsine) - ATMI 製造廠, 製造商,供應商, 產品, 製造

gas
(SDS2 Arsine)

The SDS® Safe Delivery Source technology, introduced by Matheson
Tri-Gas and ATMI, Inc. in 1994, uses an adsorbent material to store
pure arsine gas at a pressure below one atmosphere. The dopant
gas is extracted from the SDS® Safe Delivery Source by the pressure
differential between the cylinder and the ion implant chamber. The
potential for an accidental release of gas, a concern with
compressed mixtures, is minimized. The SDS® Safe Delivery
Source also compares favorably to solid sources by reducing the
time required for species changes, resulting in improved productivity
and maintaining process quality.