Hot Wall Reactor

Epigress is known for its multiwafer hot-wall CVD production
equipment for wide bandgap semiconductors such as SiC (Silicon
Carbide). Epigress combines unique AIXTRON multi-wafer Planetary
Reactor technology with high temperature, hot-wall SiC system
expertise. The VP2400HW Hot-Wall Planetary Reactor represents
the most advanced equipment for SiC CVD with proven system
design and manufacturing guarantees unsurpassed production
performance and efficiency.
The product portfolio also comprises bulk growth equipment utilizing
the hot-wall technology.
SiC is a superior material system for high power and high frequency
applications. SiC high power rectifiers and transistors will lead to
more efficient solutions in power supply and power conversion
applications.